Thermal Evaporation Systems

All Categories > Thermal Evaporation Systems

Robust and flexible thin film coating and deposition clean room compatible system suitable for R&D, prototyping and production. 

Three chamber sizes and flexible configurations for e-beam and thermal evaporation processes.

Lusix offers various sizes of e-beam and thermal evaporation systems with multiple evaporation sources.  We offer a wide choice of standard and custom-built substrate fixtures.  The system is fully automated and comes with a robust software package and a user-friendly interface,

including programmable recipes that are customized to customer’s process needs. The systems are made of high quality components and electro-polished, 304 or 316 stainless steel. We offer process assistance and optimization support.