High Vacuum Furnaces

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Lusix vacuum furnaces cover a wide range of applications, chamber sizes and operate in temperatures of up to 1,100°c.

The furnaces are clean room compatible and suitable for R&D, prototyping and production.

Lusix high and ulra-high vacuum furnaces are fully automated and come with multiple optional configurations such as customized substrate fixtures and independently heated shelves for optimal performance. The system is fully automated and comes with a robust software package and a user-friendly interface, including

programmable recipes that are customized to customer’s process needs. The systems are made of high quality components and electro-polished, 304 or 316 stainless steel. We offer process assistance and optimization support.