E-Beam Evaporation Systems

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Robust and flexible thin film coating and deposition clean room compatible system suitable for R&D, prototyping and production.

Two chamber sizes and flexible configurations for E-Beam and thermal evaporation processes.

Lusix electron beam (E-Beam) evaporation systems come in two chamber sizes with multiple evaporation sources.  We offer a wide choice of standard and custom-built substrate fixtures. The system is fully automated and comes with a robust software package and

a user-friendly interface, including programmable recipes that are customized to customer’s process needs. The systems are made of high quality components and electro-polished, 304 or 316 stainless steel. We offer process assistance and optimization support.